Cluster-cluster coalescence process of monodispersed Co clusters with mean
diameter d = 8.5 and 13 nm deposited a plasma-gas-condensation-type cluster
beam deposition system was investigated by in situ electrical conductivity
measurements and ex situ scanning electron microscopy (SEM) and transmissi
on electron microscopy (TEM), and analyzed by percolation concept. The elec
trical conductivity measurement and TEM observation indicated that, below t
emperature T approximate to 100 degreesC, the Co clusters in the assemblies
maintain their original structure as deposited at room temperature, while
that the inter-cluster coalescence takes place at T > 100 degreesC, althoug
h the size distribution and the interface morphology of the clusters showed
no marked change at substrate temperatures T-s less than or equal to 200 d
egreesC.