A high-accuracy digital readout technique for humidity sensor

Authors
Shi, XJ Matsumoto, H Murao, K
Citation
Xj. Shi et al., A high-accuracy digital readout technique for humidity sensor, IEEE INSTR, 50(5), 2001, pp. 1277-1282
Citations number
11
Categorie Soggetti
Instrumentation & Measurement
Journal title
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
ISSN journal
00189456 → ACNP
Volume
50
Issue
5
Year of publication
2001
Pages
1277 - 1282
Database
ISI
SICI code
0018-9456(200110)50:5<1277:AHDRTF>2.0.ZU;2-C
Abstract
A high-accuracy digital readout technique of capacitance difference for a c apacitive-type humidity sensor is presented. Based on the sigma-delta (EA) technique, the structure detects the relative humidity by providing a digit al readout of capacitance change it causes. Analysis shows that the structu re is insensitive to circuit imperfections, thus permitting the realization of digital readout with good accuracy. A resolution as high as 20 bits is achievable. Simulation results are given to confirm the effectiveness.