New theoretical analysis of the LRRM calibration technique for vector network analyzers

In this paper, a new theoretical analysis of the four-standards line-reflec t-reflect-match (LRRM) vector network-analyzer (VNA) calibration technique is presented. As a result, it is shown that the reference-impedance (to whi ch the LRRM calibration is referred) cannot generally be defined whenever n onideal standards are used. Based on this consideration, a new algorithm to determine the on-wafer match standard is proposed that improves the LRRM c alibration accuracy. Experimental verification of the new theory and algori thm using on-wafer calibrations up to 40 GHz is given.