Parameter effect on the crystallization of Nd : yttrium aluminum garnet laser-ablated TiO2 thin film

Process parameter dependency on the phase transition from anatase to rutile phase of laser-ablated TiO2 films was investigated. Lower ambient argon pr essure, longer deposition time, higher laser fluence, and smaller target-su bstrate separation give rutile phase from anatase phase at comparatively lo wer temperature. The relationship between thickness and onset temperature o f anatase-rutile transformation can be comprehensively explained in terms o f film thickness. Thinner films have higher phase transition temperature. T he presence of helium gas during deposition favors the anatase-rutile trans ition at a temperature lower than that expected from the above relationship .