SCATTERING CORRECTIONS IN SMALL-PARTICLE IMAGING

Various imaging modes in both STEM and SEM which are useful for charac terising small particles are described with direct evidence that some correction of the direct image signal is often necessary because of ad ditional scattering effects. Specific examples chosen are the effect o f substrate scattering on annular dark field images, the influence of elastic or quasi-elastic scattering on energy-selected transmission im aging and the role of local variations in backscattering and stopping power in secondary electron image contrast.. (C) 1997 Elsevier Science Ltd.