TRANSMISSION ELECTRON-MICROSCOPY CHARACTERIZATION OF INALSB INSB BILAYERS AND SUPERLATTICES/

High quality InAlSb/InSb bilayers and superlattices have been grown by magnetron sputter epitaxy and the physical structure has been charact erized by transmission electron microscopy. It was found that single l ayers of InAlSb, whose thicknesses greatly exceeded the equilibrium cr itical thickness, could be grown coherently oil (001) InSb for Al conc entrations approaching 13-15%. Also, it was observed that planar defec ts increased in density for both the bilayer and superlattice structur es as the Al concentration increased. (C) 1997 Elsevier Science Ltd.