Optical microsystems metrology - Part II

Authors
Citation
W. Osten, Optical microsystems metrology - Part II, OPT LASER E, 36(5), 2001, pp. 401-402
Categorie Soggetti
Optics & Acoustics
Journal title
OPTICS AND LASERS IN ENGINEERING
ISSN journal
01438166 → ACNP
Volume
36
Issue
5
Year of publication
2001
Pages
401 - 402
Database
ISI
SICI code
0143-8166(200111)36:5<401:OMM-PI>2.0.ZU;2-0