Optical inspection and characterization of microoptics using confocal microscopy

With the growing demand for microoptics in different areas the importance o f the characterization increases. Methods for a fast defect detection in mi crolens arrays are developed. We present a technique where the confocal pri nciple is applied for determining the variation and the absolute value of t he focal length. Additionally, using a self-filtering method the deviation of the periodic structure of microlens arrays is investigated theoretically and experimentally. Point-like defects as well as aberrations have been de tected. The introduced methods allow the fast, parallel characterization of microlens arrays. (C) 2001 Published by Elsevier Science Ltd.