We have used oxygen-plasma-assisted molecular-beam epitaxy (OPA-MBE) to gro
w CoxTi1-xO2 anatase on SrTiO3(001) for x=similar to0.01-0.10, and have mea
sured the structural, compositional, and magnetic properties of the resulti
ng films. Whether epitaxial or polycrystalline, these CoxTi1-xO2 films are
ferromagnetic semiconductors at and above room temperature. However, the ma
gnetic and structural properties depend critically on the Co distribution,
which varies widely with growth conditions. Co is substitutional in the ana
tase lattice and in the +2 formal oxidation state in ferromagnetic CoxTi1-x
O2. The magnetic properties of OPA-MBE grown material are significantly bet
ter than those of analogous pulsed laser deposition-grown material. (C) 200
1 American Institute of Physics.