Dilute magnetic semiconductor GaN with a Curie temperature above room tempe
rature has been achieved by manganese doping. By varying the growth and ann
ealing conditions of Mn-doped GaN we have identified Curie temperatures in
the range of 228-370 K. These Mn-doped GaN films have ferromagnetic behavio
r with hysteresis curves showing a coercivity of 100-500 Oe. Structure char
acterization by x-ray diffraction and transmission electron microscopy indi
cated that the ferromagnetic properties are not a result of secondary magne
tic phases. (C) 2001 American Institute of Physics.