EVALUATION OF THE LIFETIME AND FAILURE PROBABILITY FOR INTER-POLY OXIDES FROM RVS MEASUREMENTS

In this paper a practical characterization methodology for inter-poly oxides is described. Three different inter-poly oxides were tested, ch aracterized and compared. The test included Constant Voltage Stress (C VS) and Ramped Voltage Stress (RVP) measurements on small area capacit ors and only RVS on large area capacitors. It is confirmed that the 1/ E Berkeley model is suitable for inter-poly oxide characterization. A method for the prediction of the failure probability from RVS data of large area capacitors at operating conditions is demonstrated on the b asis of the 1/E model for the comparison of the inter-poly oxides.