INFLUENCE OF IONIZING-RADIATION ON THE CONDUCTION PROPERTIES OF ULTRA-THIN SILICA LAYERS

Authors
SARRABAYROUSE GJ SALACE G AASIME A PETIT C
Citation
Gj. Sarrabayrouse et al., INFLUENCE OF IONIZING-RADIATION ON THE CONDUCTION PROPERTIES OF ULTRA-THIN SILICA LAYERS, Microelectronics, 25(7), 1994, pp. 583-588
Citations number
12
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Microelectronics → ACNP
ISSN journal
00262692
Volume
25
Issue
7
Year of publication
1994
Pages
583 - 588
Database
ISI
SICI code
0026-2692(1994)25:7<583:IOIOTC>2.0.ZU;2-U
Abstract
The influence of X-ray irradiation on the conduction properties and br eakdown of silica layers less than 10 nm thick has been investigated. It has been found that these properties are net drastically affected, and that the X-ray irradiation induces a decrease of the defectiveness , as for much thicker layers.