Measurement of subtle strain modifications in heterostructures by using X-ray mapping in reciprocal space

The application of X-ray mapping in reciprocal space to the measurement of subtle strain modifications in heterostructures is analysed, focusing on st rain analysis in non-cubic crystals. Special attention is paid to the enhan cement of the precision of the mapping technique in comparison with convent ional diffraction profile measurements. The capabilities of the mapping-bas ed strain analysis are illustrated by selected examples of epitaxially grow n structures (obeying Vegard's rule), as well as implanted structures with unknown mismatches between the lattice parameters of the damaged layer and of the crystal bulk.