G. Goerigk et Dl. Williamson, Comparative anomalous small-angle x-ray scattering study of hotwire and plasma grown amorphous silicon-germanium alloys, J APPL PHYS, 90(11), 2001, pp. 5808-5811
The nanostructure of hydrogenated amorphous silicon-germanium alloys, a-Si1
-xGex:H, prepared by the hotwire deposition technique (x=0.06-0.79) and by
the plasma enhanced chemical vapor deposition technique (x=0 and 0.50) was
analyzed by anomalous small-angle x-ray scattering experiments. For all all
oys with x >0 the Ge component was found to be inhomogeneously distributed
with correlation lengths of about 1 nm. A systematic increase of the separa
ted scattering was found due to the increasing Ge concentration. The differ
ent preparation techniques show significant differences in the Ge distribut
ion. (C) 2001 American Institute of Physics.