We report propagation loss measurements in single-mode GaAs-AlGaAs racetrac
k microresonators with bending radii from 2.7 mum to 9.7 mum. The experimen
tal data were found to be in good agreement with a physical-loss model whic
h accounts for the bending loss, the scattering loss due to surface roughne
ss on the waveguide sidewalls, and the transition loss at the straight-to-b
end waveguide junctions. The model also enables us to identify the dominant
loss mechanisms in semiconductor microcavities. We found that for racetrac
ks with large bending radii (greater than 4 mum, in our case) the loss due
to surface-roughness scattering in the curved waveguides dominates, whereas
for small-radius rings, the modal mismatch at the straight-to-bend wavegui
de junctions causes the biggest loss. This result suggests that circular-sh
aped rings are preferable in the realization of ultrasmall low-loss microca
vities. We also show that the round-trip propagation loss in small-radius r
acetrack microresonators can be minimized by introducing a lateral offset a
t the straight-to-bend waveguide junctions.