Rapid preparation of lead titanate sputtering target using spark-plasma sintering

Citation
T. Takeuchi et al., Rapid preparation of lead titanate sputtering target using spark-plasma sintering, J AM CERAM, 84(11), 2001, pp. 2521-2525
Citations number
27
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF THE AMERICAN CERAMIC SOCIETY
ISSN journal
00027820 → ACNP
Volume
84
Issue
11
Year of publication
2001
Pages
2521 - 2525
Database
ISI
SICI code
0002-7820(200111)84:11<2521:RPOLTS>2.0.ZU;2-V
Abstract
PbTiO3 sputtering targets 8 cm in diameter were prepared using spark-plasma sintering (SPS) for relatively short periods, similar to2 min. Submicromet er-sized PbTiO3 powders with a relatively large size distribution were dens iried to similar to 86% of the theoretical X-ray density using the SPS proc ess. In contrast, large-sized (8 cm in diameter) ceramics could not be prep ared from starting powders with a relatively narrow particle-size distribut ion. Formation of cracks in the large PbTiO3 targets was observed when samp les were prepared under higher pressures (> 50 Mpa) or at higher temperatur es (> 900 degreesC). Crack formation was attributed to unrelaxed internal s tress originating from lower pore contents and from an inhomogeneous distri bution of cations in the ceramics prepared under these conditions.