Current noise at the oxide hard-breakdown

Authors
Crupi, F Ciofi, C Iannaccone, G Neri, B Lombardo, S
Citation
F. Crupi et al., Current noise at the oxide hard-breakdown, MICROEL ENG, 59(1-4), 2001, pp. 43-47
Citations number
8
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
MICROELECTRONIC ENGINEERING
ISSN journal
01679317 → ACNP
Volume
59
Issue
1-4
Year of publication
2001
Pages
43 - 47
Database
ISI
SICI code
0167-9317(200111)59:1-4<43:CNATOH>2.0.ZU;2-5
Abstract
In this work we analyze the noise properties of the current at the hard-bre akdown of a 6 nm thick oxide in an MOS structure. It is shown that in the q uantum point contact case single fluctuators, probably consisting of electr on traps inside the oxide, can be resolved, whereas the current noise at th e thermal breakdown presents a 1/f spectrum, due to the averaging process b etween many of these fluctuators. (C) 2001 Published by Elsevier Science B. V.