A computational model for oxide breakdown: theory and experiments

Authors
Alam, A Weir, B Bude, J Silverman, P Ghetti, A
Citation
A. Alam et al., A computational model for oxide breakdown: theory and experiments, MICROEL ENG, 59(1-4), 2001, pp. 137-147
Citations number
34
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
MICROELECTRONIC ENGINEERING
ISSN journal
01679317 → ACNP
Volume
59
Issue
1-4
Year of publication
2001
Pages
137 - 147
Database
ISI
SICI code
0167-9317(200111)59:1-4<137:ACMFOB>2.0.ZU;2-W
Abstract
The present status of computational models for oxide reliability and their success in interpreting the experimental data are reviewed. We find that si gnificant progress has been made in theoretical modeling of all aspects of reliability, and this understanding of the underlying degradation mechanism allows continued oxide scaling beyond the limits previously assumed possib le. (C) 2001 Published by Elsevier Science B.V.