A simple model for the simulation of the potential distribution and tunnel
currents in MOS structures with metal or poly-Si gate electrodes is propose
d. Only the ground quantum state of particles near the Si/SiO2 interfaces i
s considered. The model is applicable for all bias conditions and any dopin
g density within Si and poly-Si. Good agreement with experimental data and
more refined theories is demonstrated. (C) 2001 Elsevier Science B.V. All r
ights reserved.