Ellipso-Height Topometry, EHT: extended topometry of surfaces with locallychanging materials

The principle of the new Ellipso-Height Topometry and the basic relations f or measurement and calibration are shown in detail. First topography sets a re presented and discussed: topography of the height, of the ellipsometric angles psi and Delta, of the real and imaginary part of the complex refract ive index, of the corrected heights, of the local thickness, and material m aps. Results for two different samples are presented: a photolithographic o bject with microstructures of silicon and SiO2 and a rough surface of a cyl inder bore of a automobile engine, demonstrating the use for industrial app lication.