S. Schmidt et Ca. Grimes, Characterization of nano-dimensional thin-film elastic moduli using magnetoelastic sensors, SENS ACTU-A, 94(3), 2001, pp. 189-196
Application of magnetoelastic thick-film sensors to the measurement of thin
-film elastic moduli is described in this study. An analytical model is der
ived, that relates the resonant frequency of a magnetoelastic sensor to the
elasticity and density of an applied thin-film. Limits of the model are an
alyzed, and related to experimental measurements using thin-films of silver
and aluminum. For 500 nm thick-films, the measured Young's modulus of elas
ticity for Al and Ag is found to be within 1.6% of standard data. Using com
mercially available magnetoelastic sensors, the elasticity of coatings, app
roximately 30 nm thick, can readily be measured. (C) 2001 Elsevier Science
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