Synthesis and mechanism of BC2N thin films in stalk-like growth

The BC2N thin films in stalklike growth have been deposited by hot filament assisted and rf plasma chemical vapor deposition (CVD). It was shown that the composition of the thin films mainly consists of BC2N, in which B, C an d N were combined in atomic bonds. And the surface of the film took the sha pe of stalks, they were in regular arrangement with a uniform orientation o bserved with scanning electron microscopy. In addition, we found this kind of growth had intimate relation with the deposition parameters. Finally, we analyzed the growth machanism of the stalklike BC2N.