The self-assembling of InAs quantum wires on (001) InP substrates during ch
emical beam epitaxy has been studied. The samples were characterized by ref
lection high-energy electron diffraction (RHEED), atomic force microscopy,
and high-resolution transmission electron microscopy (HRTEM). By monitoring
the RHEED chevron structures along the [1 (1) over bar0] direction, we stu
died the facets formation during the initial states of InAs growth. The fac
ets angles measured by HRTEM are in perfect agreement with the angles betwe
en chevron streaks. A time dependence of the chevron streaks angles is repo
rted and correlated to the wire formation. These results can be interpreted
using nonequilibrium models existing in literature. (C) 2001 American Inst
itute of Physics.