V. Agache et al., Stiction-controlled locking system for three-dimensional self-assembled microstructures: Theory and experimental validation, APPL PHYS L, 79(23), 2001, pp. 3869-3871
The premise of our study lies in the controlled use of the phenomenon of st
iction to lock three-dimensional self-assembled polycrystalline silicon (po
lysilicon) microstructures. The stiction refers to the permanent adhesion o
f the microstructures to adjacent surfaces. It can occur either during the
final stage of the micromachining process, that is to say the releasing of
the microstructural material, or after the packaging of the device, due to
overrange input signals or electromechanical instability. As a result, we o
ften regard stiction as a major failure issue in the microelectromechanical
systems fabrication. This letter reports both the theory of our stiction-c
ontrolled locking system operation mode and the validation of our original
concept through the stiction-locking of a three-dimensional self-assembled
device. (C) 2001 American Institute of Physics.