Deposition of diamond-like carbon films by using liquid phase electrodeposition technique and its electron emission properties

Authors
Jiu, JT Li, LP Cao, CB Zhu, HS
Citation
Jt. Jiu et al., Deposition of diamond-like carbon films by using liquid phase electrodeposition technique and its electron emission properties, J MATER SCI, 36(24), 2001, pp. 5801-5804
Citations number
26
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF MATERIALS SCIENCE
ISSN journal
00222461 → ACNP
Volume
36
Issue
24
Year of publication
2001
Pages
5801 - 5804
Database
ISI
SICI code
0022-2461(2001)36:24<5801:DODCFB>2.0.ZU;2-8
Abstract
We have deposited diamond-like carbon (DLC) films by electrodeposition tech nique in methanol liquid. XPS showed the films mainly contain carbon. IR sp ectrum indicated that as-deposited films are hydrogenated carbon films, wit h the hydrogen mainly bonded to sp(3) carbon. Raman measurement suggested t hat the films consisted of sp(3) and sp(2) carbon. The field emission (FE) property of DLC coated on Si has been measured. The field emission of DLC f ilms started at an applied voltage of 160 V, compared with silicon tip arra ys at 600 V, and an emission current of DLC films up to 55 muA at 360 V was achieved. (C) 2001 Kluwer Academic Publishers.