MULTIPLE-WAVELENGTH VERTICAL-CAVITY SURFACE-EMITTING LASER ARRAYS

Multiple-wavelength vertical-cavity surface-emitting laser (MW-VCSEL) arrays are fabricated using two patterned-substrate growth techniques both in conjunction with a location-resolvable in situ laser reflectom eter in a molecular beam epitaxy (MBE) system, a backside pattern on t he substrate is used to induce a temperature profile on the growth sur face, Ena the first technique, we used a temperature-dependent growth rate to create MW-VCSEL's, whereas for the second, uniform growth was first performed followed by a temperature-dependent re-desorption proc ess to create the thickness gradient required for MW-VCSEL's. We achie ved a record wavelength span, accurate and repeatable lasing wavelengt hs, and reproducible multiple-wavelength VCSEL arrays with high perfor mance. Comparison between the two methods will be discussed.