Plasma deposition of La0.8Sr0.2MnO3 thin films on yttria-stabilized zirconia from aerosol precursor

For the first time, thin films of perovskite-type La0.8Sr0.2MnO3 (LSM) were deposited on yttria-stabilized zirconia (YSZ) substrates by microwave plas ma coating technique, using an aerosol precursor generated by ultrasonic ex citation. Precursor was a mixed aqueous solution containing the correspondi ng nitrates and glycine which could promote the thermal decomposition of ni trates. The deposited film had a single-phase perovskite microstructure wit h a thickness of 4-5 mum. The metal element ratio of the as-deposited film was close to that of the solution. Studies showed that glycine played a vit al role for obtaining the single perovskite phase La0.8Sr0.2MnO3 2001 Elsev ier Science B.V. All rights reserved.