A precision linear actuator using piezoelectrically driven friction force

A friction drive-type precision actuator which is capable of high positioni ng accuracy was developed by using piezoelectric elements. To anticipate dy namic behavior, system modeling was performed by using stick-slip friction models such as classical, Karnopp, and reset integrator. Dynamic characteri stics over various types or driving input signals and driving conditions we re investigated by simulation and experiment. By varying phase angle differ ence and amplitude of driving inputs, it was found that it is possible to c ontrol the moving direction and distance of the slider. From simulation and experimental results, it was observed that the dynamic behavior of the Sim ulation predictions agreed well with that of experimental results. This ind icates that the model developed in this study is applicable to many other p recision mechanisms in which driving friction force is generated by ellipso idal motion. (C) 2001 Published by Elsevier Science Ltd.