Rf. Boivin et al., Electron temperature measurement by a helium line intensity ratio method in helicon plasmas, PHYS PLASMA, 8(12), 2001, pp. 5303-5314
Electron temperature measurements in helicon plasmas are difficult. The pre
sence of intense rf fields in the plasma complicates the interpretation of
Langmuir probe measurements. Furthermore, the non-negligible ion temperatur
e in the plasma considerably shortens the lifetime of conventional Langmuir
probes. A spectroscopic technique based on the relative intensities of neu
tral helium lines is used to measure the electron temperature in the HELIX
(Hot hELicon eXperiment) plasma [P. A. Keiter , Phys. Plasmas 4, 2741 (1997
)]. This nonintrusive diagnostic is based on the fact that electron impact
excitation rate coefficients for helium singlet and triplet states differ a
s a function of the electron temperature. The different aspects related to
the validity of this technique to measure the electron temperature in rf ge
nerated plasmas are discussed in this paper. At low plasma density (n(e)les
s than or equal to 10(11) cm(-3)), this diagnostic is believed to be very r
eliable since the population of the emitting level can be easily estimated
with reasonable accuracy by assuming that all excitation originates from th
e ground state (steady-state corona model). At higher density, secondary pr
ocesses (excitation transfer, excitation from metastable, cascading) become
more important and a more complex collisional radiative model must be used
to predict the electron temperature. In this work, different helium transi
tions are examined and a suitable transition pair is identified. For an ele
ctron temperature of 10 eV, the line ratio is measured as a function of pla
sma density and compared to values predicted by models. The measured line r
atio function is in good agreement with theory and the data suggest that th
e excitation transfer is the dominant secondary process in high-density pla
smas. (C) 2001 American Institute of Physics.