THE RAPID VISUALIZATION OF RESISTIVITY INHOMOGENEITIES IN HIGH-RESISTIVITY SEMICONDUCTOR-FILMS

This paper describes for the first time an application of an ionizatio n type semiconductor photographic system using a chalcopyrite-type sem iconductor (CuInSe2) copper-indium-diselenide film as a target for rap id visulization of resistivity inhomogeneities. The CuInSe2 semiconduc tor films with a resistivity of 10(7) Omega cm (thickness 0.25 mu m) i n a planar gas discharge cell, have been studied. A measurement is rea lized by recording the spatial distribution of the gas discharge radia tion intensity between two parallel electrodes. A gas discharge gap ha s been formed by a dielectric separator with thicknesses ranging from 40 to 60 mu m. A discharge has been realized in air at pressures from 760-60 Torr. The assessment of the resistivity inhomogeneities is then based on an analysis of the discharge radiation, visualized by a phot ograph taken through the SnO2 film.