We have fabricated a microchip Coulter counter on a quartz substrate, and h
ave used it to detect individual nanoscale colloidal particles with a sensi
tivity proportional to each particle's size. We demonstrate the ability of
this device to sense colloids as small as 87 nm diameter, and to distinguis
h between colloids whose diameters differ by less than 10%. Further reducti
ons in the pore size, easily done with current nanofabrication techniques,
make our device applicable to measuring biological macromolecules, such as
DNA and proteins. (C) 2001 American Institute of Physics.