Compact gate valve for UHV

Authors
Teodoro, OMND Moutinho, AMC
Citation
Omnd. Teodoro et Amc. Moutinho, Compact gate valve for UHV, VACUUM, 64(1), 2001, pp. 87-90
Citations number
2
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
VACUUM
ISSN journal
0042207X → ACNP
Volume
64
Issue
1
Year of publication
2001
Pages
87 - 90
Database
ISI
SICI code
0042-207X(20011128)64:1<87:CGVFU>2.0.ZU;2-Q
Abstract
A compact gate valve for UHV is described. The valve was designed to allow isolation of the ion source volume of an ion gun used in a surface analysis system. Therefore, filaments can be replaced without ultra-high vacuum los s in the analysis chamber. Other applications for this valve are suggested. The valve has been built inside a DN40CF flange. Operation of the valve is done by a linear actuator. Differential pumping is possible with the use o f a Tee in the actuator connection. The construction details are described and the testing results are presented. (C) 2001 Elsevier Science Ltd. All r ights reserved.