The formation of high-temperature phases in low-doped H:LiTaO3 waveguide la
yers in Z-cut LiTaO3 has been observed both by refractive-index and IR-spec
tra measurements. This permits us to correlate the index jumps to the chang
es of the OH bonds in the crystal lattice. Reversible phase transitions wer
e detected in the temperature interval T = 50-200 degreesC over a wide rang
e of hydrogen content including as-grown LiTaO3. The high-temperature phase
s are metastable close to room temperature. This was demonstrated by tracin
g the time evolution of the refractive-index change. It was shown that the
high-temperature phases are responsible for the long-term refractive-index
instabilities in both H:LiTaO3 waveguides and virgin LiTaO3