New silicon-based fibre assemblies for applications in integrated optics and optical MEMS

Nearly closed rhombus-shaped channels in micromachined silicon with very hi gh accuracy for fibre array assemblies are presented. The fabrication and t he assembly of fibres are described. The achieved accuracy is comparable wi th conventional V-groove assemblies. Additionally, rhombus-shaped channels allow new applications such as monitor pigtails with integrated photodiodes or buried fibre supplies in optical MEMS.