Surface engineering of diamond tips for improved field electron emission

Results are reported on the study of surface engineering of diamond microti ps for improved field electron emission. Two-dimensional (2D) arrays of dia mond pyramids were prepared using a molding technique. As-grown diamond pyr amids of 3 and 9 mum in size with sharp apexes were insulating and showed a relatively poor field electron emission. Several ways are examined to prov ide an electrical conductivity of diamond in order to supply electrons for the emission: diamond boron doping, partial graphitization / amorphization by nitrogen ion implantation and / or high temperature annealing, formation of built-in conductive metal layers. A perceptible improvement of surface electrical conductivity and reduction of field electron emission thresholds down to 10 V / mum was observed. For explanation of the results it was eno ugh to take into account only the geometric field enhancement on pyramids a pexes. (C) 2001 Elsevier Science B.V. All rights reserved.