Characterization of AFM cantilevers coated with diamond-like carbon

The resonance frequency of AFM cantilevers depends on the elastic modulus a nd on the dimensions of the cantilever. As for coated cantilevers, the reso nance frequency will be determined not only by the properties of the cantil ever. but also by the properties of the coating (elastic modulus and thickn ess). We have carried out a systematic investigation of cantilevers coated with several thicknesses of the DLC films. Measurements of the resonance fr equency of the cantilevers, before and after the DLC coating, were used wit h a model to determine the elastic modulus of the DLC. The elastic modulus obtained for the DLC. with this model, was E-2 = 616 GPa. The AFM tip radii were also measured after coating and were found to increase with the DLC f ilm thickness. (C) 2001 Elsevier Science B.V. All rights reserved.