Ya. Jeon et al., Effect of Ni doping on improvement of the tunability and dielectric loss of Ba0.5Sr0.5TiO3 thin films for microwave tunable devices, JPN J A P 1, 40(11), 2001, pp. 6496-6500
The structural, microstructural, and surface morphological properties of Ba
0.5Sr0.5TiO3 thin films were investigated as a function of Ni dopant concen
tration. The Ni-dopant concentration in BST films has a strong influence on
the material properties including dielectric and tunable properties as wel
l as film growth rate, Ni doped (less than or equal to3 mol%) BST films sho
wed denser, smoother, and smaller grain sizes than those with 6 and 12 mol%
Ni. Dielectric constant and loss of 3 mol% Ni-doped BST films were about 9
80 and 0.3%,. respectively. In addition, tunability and figure of merit of
3 mol% doped BST films showed maximum values of approximately 39% and 108,
respectively. Correlation of the material properties with dielectric and tu
nable properties suggests the the 3 mol% Ni-doped BST films are the optimal
choice for tunable device applications.