PREPARATION OF AL ALN CERMET FILM BY COSPUTTERING - STRUCTURAL ASPECTS AND OPTICAL-PROPERTIES/

Aluminium/aluminium nitride (Al/AlN) cermet films have been deposited by radio-frequency cosputtering. Determination of percolation threshol d q(c) = 0.22 was derived from microstructural analysis and conductivi ty measurements. SIMS measurements also revealed inhomogeneities of at omic composition versus depth profile. Optical properties have been re ported both in the mid-infrared and partly visible range. Comparison w ith a model using multilayer-films and Bruggeman model have been made. In the end, the influence of surface roughness on reflectance behavio ur is also discussed. For more details, an article on Al-AlN microstru cture will be published in a forthcoming paper.