Collisional effects on the radio-frequency sheath dynamics

Using the hydrodynamic model, we have derived a self-consistent model descr ibing the dynamics of a collisional rf sheath driven by a sinusoidal curren t source. Numerical results have been obtained for the dependence of ion de nsity, ion kinetic energy, sheath thickness, and sheath electric field, on the collision parameter and the current source parameter. (C) 2001 American Institute of Physics.