The formation of C54 TiSi2 using Ti-Nb alloys deposited on polycrystalline
Si substrates was studied by means of in situ x-ray diffraction and resista
nce measurements during temperature ramping. Alloys with Nb contents rangin
g from 0 to 13.6 at. % were used. The formation temperature of C54 TiSi2 wa
s reduced in the presence of Nb. However, the addition of Nb in Ti did not
cause fundamental changes in the evolution of resistance versus temperature
. This latter observation suggests that the mechanism for the formation of
C54 TiSi2 remained the same in spite of the enhancement effect. For alloys
with up to 8 at. % of Nb, the C49 TiSi2 phase formed first, as with pure Ti
. When annealing the alloy with 13.6 at. % Nb, neither C49 TiSi2 nor C54 we
re found in the usual temperature ranges, instead, C40 (Nb,Ti)Si-2 was obse
rved. This phase transformed to C54 (Nb,Ti)Si-2 above 950 degreesC. The app
arent activation energy associated with the formation of C54 TiSi2 was obta
ined by annealing the samples at four different ramp rates from 3 to 27 K/s
; it decreased continuously from 3.8 to 2.5 eV with increasing Nb content f
rom 0 to 8 at. %. The apparent activation energy for the formation of C40 (
Nb,Ti)Si-2 was found to be 2.6 eV. The possible physical meaning, or lack t
hereof, of the high activation energies derived from experimental measureme
nts is extensively discussed. A qualitative model is proposed whereby nucle
ation would be rate controlling in pure TiSi2, and interface motion in samp
les with 8 at. % Nb. (C) 2001 American Institute of Physics.