An angle-based design approach for rectangular electrostatic torsion actuators

In this paper, we develop a fast, angle-based design approach for rectangul ar electrostatic torsion actuators based on several simple equations. This approach is significantly more straightforward than the usual full calculat ion or simulation methods. The main results of the simplified approach are verified by comparing them with analytical calculations and MEMCAD simulati ons with fractional difference smaller than 3 % for torsion mode dominant a ctuators. Also, good agreement is found by comparison with the measured beh avior of a microfabricated full-plate device.