High resolution X-ray fluorescence measurements using a flat analyzer crystal and an X-ray CCD

High resolution X-ray fluorescence measurements were carried out using a fl at analyzer crystal and an X-ray CCD (charge-coupled device). A comparison of the detector was made between the CCD and the position sensitive proport ional counter (PSPC), and the advantage of the CCD in better spatial resolu tion and two-dimensional spatial resolution was demonstrated. Full width at half maximum (FWHM) of measured Cu K alpha (1,2) X-ray fluorescence spectr a shows clear dependence of beam size on the sample, and the FWHM of 2.4eV can be expected with the use of an X-ray microbeam.