Active material micro-actuator arrays fabricated with SU-8 resin

Citation
Bj. Pokines et al., Active material micro-actuator arrays fabricated with SU-8 resin, MICROSYST T, 7(3), 2001, pp. 117-119
Citations number
10
Categorie Soggetti
Instrumentation & Measurement
Journal title
MICROSYSTEM TECHNOLOGIES
ISSN journal
09467076 → ACNP
Volume
7
Issue
3
Year of publication
2001
Pages
117 - 119
Database
ISI
SICI code
0946-7076(200110)7:3<117:AMMAFW>2.0.ZU;2-Y
Abstract
Active materials such as piezoelectric ceramics and shape memory metal allo ys commonly actuate active control and intelligent material systems. Commer cially available piezoelectric materials exhibit small actuation stroke and shape memory metal alloys have limited bandwidth. The proposed micro-actua tor array design and fabrication process increases the actuation stroke of piezoceramic material by a factor of 1.5 for a 2 x 2 array; two active mate rial segments connected in parallel and two in series, and doubles the resp onse time of a 1 x 4 shape memory alloy driven array; four active materials segments connected in series. A high aspect ratio fabrication method incor porating SU-8 resin and conventional lithography is the process that forms the array linkages. The SU-8 resin array structures are 300 mum tall.