UNIT-CELL BY UNIT-CELL EPITAXIAL-GROWTH OF SRTIO3 AND BATIO3 THIN-FILMS BY LASER MOLECULAR-BEAM EPITAXY

Atomically regulated unit-cell by unit-cell homoepitaxial SrTiO3 and h eteroepitaxial BaTiO3 films were fabricated on SrTiO3(100)) substrates by laser molecular beam epitaxy The fine streak patterns and more tha n 1000 cycles undamping intensity oscillation were obtained by in situ reflection high-energy electron diffraction with precisely controlled intermittence between each unit-cell layer. The surface morphology of the films was examined by atomic force microscopy. The root-mean-squa re surface roughness of the films is about 0.1 nm.