We present a quantitative rate-equation approach to irreversible submonolay
er growth on a two-dimensional substrate. Our method explicitly takes into
account the existence of a denuded ("capture") zone around every island and
the correlations between the size of an island and the corresponding avera
ge capture zone. The evolution of the capture-zone distributions is describ
ed by a set of Voronoi-area evolution equations, which are coupled to the u
sual rate equations for the island densities through local rates of monomer
capture. The combined set of equations leads to a fully self-consistent ca
lculation of the size- and coverage-dependent capture numbers. The resultin
g predictions for the average capture-zone and capture-number distributions
are in excellent agreement with experimental results and Monte Carlo simul
ations. As a result, the corresponding scaled island size distributions and
their dependence on coverage and deposition rate are also accurately predi
cted in the precoalescence regime.