Characterization of multi-parameters of piezoelectric thin films

Based on two sets of approximate equations deduced from the resonance spect rum of the input electrical impedance of the composite resonator consisted of a thin film deposited on a substrate, the density rho, stiffed elastic c onstant C-33(,)D electromechanical coupling constant k(l)(2) of the film an d the elastic constant C-33 of the substrate can be calculated directly. Th en the dielectric constant epsilon (s)(33) can be calculated from the value s of the parameters above and the input impedance at some special resonance frequencies. When epsilon (S)(33), C-33(D) and k(l)(2) are known, piezoele ctric constant h(33) can be obtained. The accuracy of the method is checked on two typical samples by numerical simulation.