Noncontact measurement of film-substrate interface strength by pulsed laser spallation technology

Recently, we measured the dynamic interface strength between film and subst rate by using a modified laser spallation setup, and developped a novel dia gnostic technology. A new spallation criteria of progressive damages at the interface between the film and the matrix is established based on the corr elation analysis technology. We also suggest a new computer algorithm for e stimating the dimension of damages (i.e. fracture), such as the width of de lamination, the minimum size of delamination radius, and so on. The experim ent results show that the dynamic interface strength of TiN/stainiess-steel is about 250 MPa. The detailed results, analyses and discussions will be p resented in this paper.