An analysis on the flexural vibration of cantilever beam of tapping mode scanning force microscopy

A cantilever beam model for dealing with the flexural vibration of the micr o-mechanical system in the My dynamic tapping mode scanning force microscop y (SFM) was presented. An analytical solution for the vibration differentia l equation of the cantilever beam with viscous damping and piece-wise linea r interaction force was found by using the method of parameter transformati on and mode expansion theorem. The examples of numerical simulation were gi ven.