On the two-dimensional capacitance calculation of multiconductor multilayered interconnects

In this paper a method for analysis and modelling of transmission interconn ect lines on multilayered dielectric media is presented. The analysis is ba sed on semianalytical layered Green's Junction and the electromagnetic conc ept of free charge density. It allows us to obtain integral equations betwe en electric scalar potential and charge density distributions. These equati ons are solved by the Galerkin procedure of the Method of Moments. After th is, the capacitance matrix of multiconductor interconnect lines in the pres ence of planar dielectric interfaces is calculated. When there exists no in finite ground plane, we enforce the constraint that the slim of all free ch arges is zero. The feasibility of the method has been shown by simulations of several transmission-line problems. The results have been compared with reported data obtained by free-space Greens function method, conformal mapp ing formulas, generalized method of lines and inverted capacitance coeffici ent matrix technique. The proposed approach is not inferior to other proced ures in terms of generality and memory requirements. At the same time, a re duction of the central processing unit (CPU) time is achieved because the i ntegral equations are solved numerically only on the surface of conductor l ines.