Femtosecond laser deep hole drilling of silicate glasses in air

Citation
L. Shah et al., Femtosecond laser deep hole drilling of silicate glasses in air, APPL SURF S, 183(3-4), 2001, pp. 151-164
Citations number
51
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
APPLIED SURFACE SCIENCE
ISSN journal
01694332 → ACNP
Volume
183
Issue
3-4
Year of publication
2001
Pages
151 - 164
Database
ISI
SICI code
0169-4332(20011128)183:3-4<151:FLDHDO>2.0.ZU;2-C
Abstract
Femtosecond laser pulses are ideal for many precise and delicate laser proc essing applications. In this work, we demonstrate that femtosecond laser pu lses can be used to produce microscopic holes (< 100)mum diameter) with mac roscopic depth (>1 mm) in silicate glasses at atmospheric pressures. These experiments indicate that self-focusing is an important factor affecting ho le depth at high laser intensity. (C) 2001 Elsevier Science B.V All rights reserved.